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为了使行波管能够稳定的工作,我们在它的夹持慢波线的介质杆上溅射钽铝合金薄膜。这种薄膜既能有效地吸收反射电磁波能量,又能保证入射电磁波能量顺利地通过(吸收极少),所以称其为衰减膜,或者叫行波管的衰减器。用钽铝合金膜做衰减器是很理想的材料,不但用于大功率行波管、正交场和前向波放大器,而且也用于微波测量元件的精密衰减器。一、钽铝合金膜的制备方法和实验结果我们利用自制的空心阴极直流二极溅射设备制造钽铝合金膜,其原理图如图1所示。
In order for the TWT to work stably, we sputtered tantalum aluminum alloy film on its dielectric rod holding the slow-wave line. This film can not only effectively absorb the reflected electromagnetic wave energy, but also to ensure that the incident electromagnetic wave energy smoothly (minimal absorption), so called attenuation film, or called TWT attenuator. Tantalum alloy film attenuator is ideal material, not only for high-power traveling wave tube, orthogonal field and forward-wave amplifier, but also for precision microwave attenuator components. First, the preparation of tantalum aluminum alloy membrane and experimental results We use homemade hollow cathode DC sputtering equipment to manufacture tantalum aluminum alloy membrane, the schematic diagram shown in Figure 1.