论文部分内容阅读
传统的液栅型石墨烯场效应管虽然灵敏度高,但是石墨烯沟道极易被污染,致使器件的稳定性减小,不能被重复利用.为此,我们设计制造了一种顶栅石墨烯离子敏场效应管,以化学气相沉积生长的石墨烯为沟道,通过原子层沉积在石墨烯表面沉积绝缘层Hf O_2/Al_2O_3,其中Al_2O_3作为敏感膜,Hf O_2/Al_2O_3作为石墨烯及电极的保护膜.经过一系列的电学表征和测试发现,相较于液栅型石墨烯场效应管,顶栅石墨烯场效应管具有更高的信噪比、更好的稳定性.为了利用顶栅石墨烯进行生物分子的检测,我们将单链DNA修饰在Al_2O_3表面,成功检测到了修饰DNA前后的信号差异,并结合荧光修饰的表征验证了顶栅石墨烯场效应管用于生物传感器的可行性.
Although the traditional liquid crystal graphene FET has high sensitivity, the graphene channel can be easily contaminated, which leads to the decrease of the stability of the device and can not be reused. To this end, we design and manufacture a top-gate graphene Ion sensitive field effect transistor, graphene grown by chemical vapor deposition as the channel, deposited on the surface of graphene by atomic layer deposition insulating layer Hf O 2 / Al 2 O 3, wherein Al 2 O 3 as a sensitive film, Hf O 2 / Al 2 O 3 as graphene and electrode After a series of electrical characterization and testing found that top gate graphene FETs have higher signal to noise ratio and better stability than liquid gate graphene FETs. Graphene for biomolecule detection. We modified single-stranded DNA on Al 2 O 3 surface and successfully detected the signal difference before and after DNA modification. Combined with the characterization of fluorescence modification, we proved the feasibility of top gate graphene FET for biosensor.