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本文描述了无机物在真空中进行高速电子束蒸发的工艺过程以及控制厚凝聚层(涂膜)沉积、结构和性能的工艺参数。考察了某些厚度从几微米到几毫米的单相和多相的金属、金属-陶瓷、陶瓷合金和陶瓷的沉积例子,包括结构元素尺寸范围很宽的弥散、多层、多孔和多层分级结构的凝聚层。记录了结构的尺寸效应和厚沉积层的机械性能,并对用气相沉积无机材料的实际应用领域作了介绍。
This article describes the process of high-speed electron beam evaporation of inorganics in a vacuum and the process parameters that control the deposition, structure, and performance of a thick coacervate (coating). Some examples of the deposition of certain single- and multi-phase metals, metal-ceramics, ceramic alloys and ceramics with thicknesses from a few microns to several millimeters include diffuse, multilayer, porous and multi-layered grading of a wide range of structural element sizes Structure of the cohesion layer. The size effect of the structure and the mechanical properties of the thick deposit were recorded. The practical application of the inorganic material by vapor deposition was also introduced.