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伴随着计算机技术的迅速发展,在近15年中X射线能谱仪及其分析方法突飞猛进。从1984年开始第三代的能谱仪问世,虽然它不仅可从事微区元素分析,而且可以进行图像处理和图象分析,成为发展最快使用最广的微区分析仪器。但是在超轻元素的分析、对谱线重叠的元素的定性分析、图像处理和图像分析的功能和速度方面还存在一系列问题有待改进。一:从1990年开始,出现了第四代能谱仪,目前正在第三代和第四代能谱仪的交替过程中,相信在不久的将来第四代能谱仪将在商品市场上完全替代第三代能谱仪。现以同一公司生产的这两代能谱仪在硬件方面的主要差别罗列于下:
With the rapid development of computer technology, X-ray energy dispersive spectrometer and its analytical methods have progressed by leaps and bounds in recent 15 years. Since 1984, the third generation of spectrometers has come out. Although it can not only perform microelement analysis but also perform image processing and image analysis, it becomes the fastest growing and most widely used microanalysis instrument. However, there are still some problems to be solved in the analysis of the super-light elements, the functions and the speed of the qualitative analysis, the image processing and the image analysis of the overlapping elements of the lines. A: Since 1990, the fourth generation of spectrometer has appeared. At present, during the alternation of the third and fourth generation of spectrometers, it is believed that the fourth generation of spectrometer will be complete on the commodity market in the near future Alternative third-generation spectrometer. The main differences between these two generations of spectrometers now produced by the same company in terms of hardware are listed below: