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同步加速器是医用重离子加速器的主加速部件。考虑到其设计空间紧凑的特点及其真空系统的设计要求,采用将非蒸散型吸气剂泵(NEG)组件嵌入国产溅射离子泵(SIP)空腔内组成的复合泵作为真空系统的主泵。本文测试了复合泵的抽气性能,测试并估算了复合泵的H2饱和容量和再生周期,计算了同步加速器真空系统的压力分布。测试及计算结果表明:相比于SIP,复合泵对N2的抽速提高了20%,对H2的抽速提高了70%～100%,且具有更高的极限真空度,其再生周期为2年,压力分布能够满足同步加速器真空系统的设计要求。
Synchrotron is the main acceleration component of medical heavy ion accelerator. Considering its compact design space and the design requirements of its vacuum system, a composite pump consisting of a non-evaporable getter pump (NEG) module embedded in a hollow cavity of a domestic sputter ion pump (SIP) is adopted as a main vacuum system Pump. In this paper, the pumping performance of the compound pump was tested, the H2 saturation capacity and regeneration cycle of the compound pump were tested and estimated, and the pressure distribution of the synchrotron vacuum system was calculated. The results of tests and calculations show that the pumping speed of N2 is increased by 20% and that of H2 is increased by 70% ~ 100% compared with that of SIP, and the regeneration pump has a higher ultimate vacuum of 2 Year, the pressure distribution can meet the design requirements of synchrotron vacuum system.