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FSI国际有限公司近日宣布,一家全球性领先的亚洲晶圆厂再次定购多套ANTARES超凝态过冷动力学清洗系统,大幅提高了该平台的安装数量。该系统具有通过使用在线直流参数测试去除生产残留物的能力,而这些残留物曾被报告会导致良率的损失。这家晶圆代工厂目前使用ANTARES系统完成
FSI International Limited recently announced that a leading global fab in Asia ordered another set of ANTARES Cooled Supercooled Dynamic Cleaning Systems to significantly increase the number of installations for this platform. The system has the ability to remove production residues by using online DC parameter tests, which have been reported to result in yield loss. The foundry is currently using the ANTARES system