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对分立半导体元件来说,目前的状况是一面着重于新技术的研究,借助这种新技术研制新产品,用先进的技术作为武器攫取市场;另一方面致力于使常规的批量产品生产合理化和高效率化,总的得益是通过常规产品来决算的。本文以分立半导体元件——硅晶体管作为例子,首先叙述光刻技术对硅晶体管发展的影响,其次作为新技术研究的例子,介绍要求细线条的高频功率晶体管的现状。
For discrete semiconductor components, the current state of the art focuses on new technologies, developing new products based on this new technology, using advanced technologies as a weapon to capture the market, and on the other hand, rationalizing the production of conventional bulk products and High efficiency, the overall benefit is through conventional products to final accounts. In this paper, discrete semiconductor devices - silicon transistors as an example, the first describes the lithography technology on the development of silicon transistors, followed by the new technology as an example to introduce the requirements of thin-line high-frequency power transistor status quo.