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At different annealing temperatures, the saturation magnetostrictions and the correlation between the permeability μi and the temperature T (μi-T curves) of the Co66Fe4Mo2Si16B12 alloy were investigated using a small-angle magnetization tester and core tester. The experimental results showed that the μi-T curves had different shapes at different ranges of annealing temperature;the permeability μi of the alloy improved with the increase of the annealing temperatures below 460℃; when the alloy was annealed above 480℃, the poor magnetic properties were considered to be caused by larger saturation magnetostriction.