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对研制的安装在合肥国家同步辐射实验室(NSRL)计量光束线上的VUV/EUV标准探测器装置进行了传输标准探测器的首次标定工作.实验选取了3个能点17.625nm,6.8nm和92nm,在这3个能点处分别标定光电二极管,得到其相应的量子效率.结果表明在同一能点多次标定结果的重复一致性很好,相对标准偏差在1%—14%的水平;但是与美国国家标准计量局(NIST)标定过的光电二极管的量子效率比较,短波17.625nm的标定结果较好,而6.8nm和92nm波长的结果差距偏大.偏差主要来自光源稳定性和光谱纯净度的影响.
The standard calibration of the standard detector was carried out for the developed VUV / EUV standard detector installed on the measurement beamline of the National Synchrotron Radiation Laboratory (NSRL) in Hefei.The experiment selected three energy points of 17.625nm, 6.8nm and The corresponding quantum efficiencies were obtained by calibrating the photodiodes at these three energy points.The results showed that the repeatability of multiple calibration results at the same energy point was good and the relative standard deviation was between 1% and 14% However, the quantum efficiency of the photodiode calibrated by the National Institute of Metrology (NIST) is better than that of the photodiode calibrated by the National Institute of Metrology (NIST), but the difference between the wavelength of 6.8 nm and 92 nm is larger than that of the wavelength of 17.625 nm.The deviations mainly come from the stability of the light source and the purity of the spectrum Degree of influence.