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对周期性Ａｌ／ＳｉＯ２迭层膜式微型偏光器中的Ａｌ膜层进行了研究．高消光比的迭层膜式微型偏光器的性能主要决定于Ａｌ膜层的介电常数．从理论上分析了影响Ａｌ膜层介电常数的因素及Ａｌ膜层的介电常数偏离体金属Ａｌ相应值的原因．Ａｌ膜层溅射沉积条件实验研究结果表明，沉积速率、膜层厚度及基底形貌的控制和选择是非常重要的
The Al film in the periodic Al / SiO2 laminated film micro-polarizer was studied. High extinction than the performance of laminated film micro-polarizer mainly depends on the dielectric constant of the Al film. The factors that affect the dielectric constant of Al film and the reason that the dielectric constant of Al film deviates from the corresponding value of Al are theoretically analyzed. Experimental Investigation of Al Film Sputtering Deposition Conditions The results show that it is very important to control and select the deposition rate, film thickness and substrate topography