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分别采用无机盐的水解－沉淀法和醇盐的溶胶－凝胶法两种工艺在Ａｌ２Ｏ３基片上制备ＴｉＯｘ（ｘ＝１—２．０）薄膜，研究了薄膜结构及氧敏特性．结果表明：水解－沉淀法的膜层粒子分布均匀，工艺易控制；溶胶－凝胶法的膜层粒子更细微，相变温度较低．两种工艺制得的超微粒薄膜都具有很好的电阻－温度稳定性．膜层粒子愈超细化，分布愈均匀，氧敏特性愈高；薄膜厚度与气体检测灵敏度有密切关系，具有最佳膜层厚度值，两种工艺获得的薄膜最佳厚度稍有差异．
The TiOx (x = 1-2.0) thin films were prepared on the Al2O3 substrates by inorganic salt hydrolysis-precipitation method and alkoxide sol-gel method respectively. The structure and oxygen-sensitive properties of the films were investigated. The results show that the particles of the hydrosilylation - precipitation method are distributed evenly and the process is easy to control. The sol - gel method has more fine particles and lower phase transition temperature. Ultrafine particles made by both processes have good resistance-temperature stability. The more the particles of the film are refined, the more uniform the distribution and the higher the oxygen sensitivity. The thickness of the film is closely related to the gas detection sensitivity, and has the best film thickness value. The optimum thickness of the film obtained by the two processes is slightly different.