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一、LCD组件的结构图1和图2分别示出松下公司研制的TFT—LCD的剖面图及非晶硅薄膜晶体管阵列的显微镜照片。 a-Si TFT阵列在56.6×42.7mm~2的显示面积内以节距89(高)×87(宽)μm~2形成了480×650象素。这种a-Si TFT阵列可用5次光刻制作而成。
I. Structure of LCD Module FIGS. 1 and 2 respectively show a cross-sectional view of a TFT-LCD developed by Panasonic Corporation and a microscope photograph of an amorphous silicon thin film transistor array. The a-Si TFT array formed 480 × 650 pixels with a pitch of 89 (height) × 87 (width) μm to 2 in a display area of 56.6 × 42.7 mm 2. This a-Si TFT array can be made using 5 lithography.