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采用真空电子束蒸发方法制备 WO3电致变色薄膜过程中 ,利用极值法光学膜厚测量技术监控薄膜的光学特性 ,对不同光学膜厚的 WO3薄膜的原始态、着色态和退色态的光谱特性进行了对比分析。测试采用二电极恒电压方法 ,用分光光度计实时测量透过率的变化。结果证明以 ITO玻璃作为比较片 ,极值法监控薄膜光学膜厚 ,当反射率达到第一极小值 ,即透过率达到第一极大值时 ,WO3薄膜得到最好的综合电致变色特性
WO3 electrochromic thin film by vacuum electron beam evaporation process, the use of optical film thickness measurement of extreme value method to monitor the optical properties of the film, different optical thickness WO3 film original state, color state and discoloration spectral characteristics Conducted a comparative analysis. The test uses a two-electrode constant voltage method, with a spectrophotometer real-time measurement of the change of transmittance. The results show that ITO glass as a comparative film, the extreme value method to monitor the optical film thickness of the film, when the reflectivity reaches the first minimum, the transmittance reaches the first maximum, the WO3 film obtained the best synthetic electrochromic characteristic