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目的 为研究石英音叉型角速率传感器提供设计参数方法 根据压电理论和弹性力学理论,讨论石英晶体振梁不同方向(光轴z和电轴x)振动的弹性柔顺常数存在的差别,导出压电梁弯曲振动的微分方程,并利用有限差分方法对几种典型的电极图形进行数值计算结果与结论 提出等效体力概念,给出了压电梁等效体力计算的一般公式,优选了振梁型传感器的电极图形,确定了压电梁宽度和高度的边比
Aim To provide the design parameters for the study of quartz tuning fork angular rate sensor According to the piezoelectric theory and the theory of elasticity, the difference of the elastic compliance constants of vibration in different directions (optical axis z and electrical axis x) of quartz crystal resonator is discussed. Beam differential equation of bending vibration, and using finite difference method to calculate the numerical results of several typical electrode patterns and conclusions of equivalent physical force concept, given the equivalent formula for the equivalent physical calculation of piezoelectric beams, the preferred beam type The electrode pattern of the sensor determines the edge ratio of the width and height of the piezoelectric beam