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在机械学领域中,类金刚石碳膜的应用尚需解决的问题之一是膜与衬底的附着性和膜厚,两者往不能统一。为此,我们采用了间歇式沉积法。实验表明,间歇式沉积可大大增加膜厚而不影响膜与衬底的附着性。
In the field of mechanics, one of the problems to be solved in the application of the diamond-like carbon film is that the adhesion between the film and the substrate and the film thickness can not be unified. To this end, we used a batch deposition method. Experiments have shown that batch deposition can greatly increase film thickness without affecting the adhesion of the film to the substrate.