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美国Sycon仪器公司的STS-200型薄膜淀积厚度/速度控制仪具有用于多层复合晶体制备的9流程、99层程序设计。该仪器采用6MHz石英晶体作传感器,把数据显示在4.5英寸的
The STS-200 Film Thickness / Velocity Controller from Sycon Instruments of the United States has a 9-flow, 99-layer program design for multilayer composite crystal preparation. The instrument uses 6MHz quartz crystal sensor, the data is displayed in 4.5 inches