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本文从加速度传感器军民两方面的需求出发,介绍了MEMS制造技术及国外采用MEMS加工技术研制的几种一维和三维硅加速度传感器,在此基础上研究了集成加速度测量系统及其工作原理。
Based on the needs of military and civilian acceleration sensors, this paper introduces MEMS manufacturing technology and several MEMS accelerometers fabricated by MEMS technology abroad. Based on this, the integrated accelerometer system and its working principle are studied.