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无外加氟施主情况下，在装有聚四氟乙烯面预电离板的准分子激光器中，放电激发Ｘｅ／Ｎｅ混合气体产生了ＸｅＦ准分子。研究了中心波长为３５１ｎｍ，３５３ｎｍ和３０８ｎｍ的发射谱。放电激发Ｋｒ／Ｎｅ混合气体，观察到了ＫｒＦ２４８ｎｍ发射谱。
In the absence of fluoride donor, an excimer laser with a polytetrafluoroethylene surface pre-ionization plate excites Xe / Ne mixed gas to generate XeF excimer. The emission spectra centered at 351 nm, 353 nm and 308 nm were studied. Kr / Ne mixed gas is excited by discharge, and the emission spectrum of KrF248nm is observed.