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为了提高半闭环微阵列制备机器人的定位精度,根据机器人运动误差具有方向性的特点,提出了分向前馈误差补偿技术。建立了微阵列制备机器人系统误差前馈补偿的传递函数模型,对系统的准确性、快速性与稳定性进行分析,从理论上证明该方法在提高机器人精度方面是可行有效的。研究并实施了回程误差与其他非线性误差的分向补偿算法。在清华大学开发的THU-biorobot微阵列制备机器人上进行了实验研究。结果表明:补偿后机器人的定位精度在±5μm以内,系统动态性能也有显著提高,能够满足微阵列制备要求。
In order to improve the positioning accuracy of semi-closed-loop microarray robots, a directional feedforward error compensation technique was proposed based on the directional characteristics of the robot’s motion errors. The transfer function model of the error feedforward compensation of robot system with microarray was established. The accuracy, speed and stability of the system were analyzed. It is proved theoretically that this method is feasible and effective in improving the accuracy of the robot. Research and implementation of return error and other non-linear error of the direction of compensation algorithm. An experimental study was carried out on a THU-biorobot microarray preparation robot developed by Tsinghua University. The results show that the positioning accuracy of the robot after compensation is within ± 5μm, and the dynamic performance of the robot is significantly improved, which can meet the requirements of microarray preparation.