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用椭偏光谱仪首次在光子能量为2.1~5.2eV的范围内,测量了不同热处理温度下Ba0.9Sr0.1TiO3(BST)薄膜的椭偏光谱,建立适当的拟合模型,并用Cauchy色散模型描述BST薄膜的光学性质,用最优化法获得了所有样品的光学常数(折射率η和消光系数κ)谱及禁带能Eg.比较这些结果,初步得到了BST薄膜的折射率η、消光系数κ和禁带能Eg随退火温度变化的变化规律.
The ellipsometric spectra of Ba0.9Sr0.1TiO3 (BST) thin films were measured at different photothermal treatments for the first time with the energy of 2.1-5.2eV using ellipsometer. The appropriate fitting model was established and the Cauchy dispersion The model describes the optical properties of BST films. The optical constants (refractive index η and extinction coefficient κ) spectrum and the forbidden band energy Eg of all the samples are obtained by the optimization method. Comparing these results, the change law of refractive index η, extinction coefficient κ and forbidden band energy Eg of BST films with annealing temperature was obtained.