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氧化物分子束外延薄膜和异质结生长技术近年来迅速发展,人们已实现以单原子层的精度来精确生长多种复杂量子材料,有力地推动了铜氧化物高温超导电性、二维电子气、氧化物电子学和自旋电子学器件等领域的研究.文章介绍了氧化物分子束外延的技术关键,并以La1-xSrxMnO3薄膜为例,介绍了钙钛矿结构的氧化物薄膜生长和刻画.特别是文章作者通过建立超高真空下的原位样品传送系统,可把薄膜样品直接传送到角分辨光电子能谱仪中,实现了薄膜的原位电子结构测量.所测得的La1-xSrxMnO3的电子结构与能带计算结果较为相符.而此类立方结构的、不可解理材料的电子结构,过去往往是无法直接测量的.
In recent years, the rapid development of oxide molecular beam epitaxy films and heterojunction growth techniques has led to the accurate growth of a variety of complex quantum materials with single atomic layer accuracy, effectively promoting the high-temperature superconductivity of copper oxides, Gas, oxide electronics and spintronics devices.In this paper, the key technology of molecular beam epitaxy is introduced, taking the La1-xSrxMnO3 thin film as an example, the growth of the oxide film of perovskite structure and In particular, the author of the article through the establishment of ultra-high vacuum in situ sample delivery system, the film samples can be sent directly to the angle-resolved photoelectron spectrometer, in-situ electronic structure of the film to measure the measured La1- The electronic structure of xSrxMnO3 is in good agreement with the band calculation results, and the electronic structures of such non-decomposable materials with cubic structure are often not directly measurable in the past.