Deposition of diamond like carbon films by using a single ion gun with varying beam source

来源 :Journal of Coal Science & Engineering(China) | 被引量 : 0次 | 上传用户：king5440

【摘要】

：

Diamond like carbon films have been successfully deposited on the steel substrate, by using a single ion gun with varying beam source. The films may appear blue

【作者】

：

姜金球陈祝平

【机构】

：

ChinaCoalResearchInstitute,TiandiScience＆TechnologyCo.Ltd

【出处】

：

Journal of Coal Science & Engineering(China)

【发表日期】

：

2001年1期

【关键词】

：

薄膜技术离子束沉积类金刚石膜非晶碳膜 ion beam deposition diamondlike carbon thin film beam sour

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Diamond like carbon films have been successfully deposited on the steel substrate, by using a single ion gun with varying beam source. The films may appear blue, yellow and transparent in color, which was found related to contaminants from the sample hold

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Deposition of diamond like carbon films by using a single ion gun with varying beam source

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