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继研制成功单模脊形锗硅合金光波导后,进一步用这种光波导试制Y分支器.文中用束传播法BPM首先从理论上分析了波长λ=1.3μm的光波在分支器中的传播特性,模拟计算了模场的传播及损耗.其次叙述了实际锗硅Y分支器的制造工艺及测量结果.结果表明,激光束耦合进锗硅分支器的输入端后,分支器的二路输出端成功输出均匀的单模光波.
Following the successful development of a single-mode ridge silicon germanium alloy optical waveguide, the Y waveguide is further manufactured using this optical waveguide. In this paper, the beam propagating method BPM is used to analyze the propagation characteristics of the light wave with wavelength λ = 1.3μm in the splitter. The propagation and loss of the mode field are simulated. Second, the actual manufacturing process of silicon germanium Y splitter and measurement results are described. The results show that after the laser beam is coupled into the input of silicon germanium splitter, the output of the splitter can output a uniform single-mode light wave successfully.