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兰州物理所根据用户需要研制的LSK—3型离子束刻蚀机获得成功,85年12月14日至19日在兰州通过了验收、验收评审工作。用户满意,验收评审会代表对该机给予了全面评价。主要意见是:(1) LSK—3型离子束刻蚀机全部达到验收评审大纲规定的技术性能指标,其中有七项超过原设计指标。整机研制包括离子源、配电系统、主体结构、自动控制
Lanzhou Institute of Physics developed according to user needs LSK-3-type ion beam etching machine success, December 1985 December 19 to 19 in Lanzhou passed the acceptance inspection acceptance review. Customer satisfaction, acceptance review on behalf of the aircraft gave a comprehensive evaluation. The main opinions are as follows: (1) All LSK-3 ion beam etching machines meet the technical performance requirements stipulated in the acceptance review outline, of which seven exceed the original design specifications. Machine development, including ion source, power distribution system, the main structure, automatic control