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声电荷转移 (Acoustic charge transport,简写 ACT)器件是 2 0世纪 80年代初出现的一种新型信号处理器件 ,它集中体现了声表面波 (SAW)和半导体技术的优点 ,能与其它信号处理器件进行单片集成 ,完成各种信号处理功能 ,在军事防御和商业方面有广泛应用。文中主要介绍 ACT器件的基本结构、工作原理以及器件工艺流程 ;最后介绍了 ACT器件的应用前景。
Acoustic charge transport (ACT) devices are new signal processing devices that emerged in the early 1980s. They focus on the advantages of surface acoustic wave (SAW) and semiconductor technology, and are compatible with other signal processing devices Monolithic integration, complete a variety of signal processing functions, military defense and commercial applications. This article mainly introduces the basic structure of ACT devices, working principle and device process flow; finally introduces the application prospect of ACT devices.