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设计故障模式及后果分析(DFMEA)能够在设计阶段充分考虑故障模式对产品功能的影响,从而提高产品设计的可靠度与安全性。但现有DFMEA的研究和应用缺少对多重条件约束的考量。基于此提出了优先理想矩阵与DFMEA集成的模型,将性能、成本、时间及其改进的余地运用到FMEA的严重性评价中。并且将此方法应用到等离子体增强化学气相沉积(Plasma Enhanced Chemical Vapor Deposition,PECVD)的设计中,提出了PECVD优化设计的流程和DFMEA计算模板。结果表明,此方法能够有效的进行PECVD故障原因与影响分析,及其系统优化设计。
Design Failure Modes and Effects Analysis (DFMEA) can take full account of the impact of failure modes on product functionality during the design phase, thereby improving product design reliability and safety. However, the existing research and application of DFMEA lack of consideration of multiple constraints. Based on this, a model of integration of priority ideal matrix and DFMEA is proposed, and the performance, cost, time and the improvement are applied to the evaluation of the severity of FMEA. The method is applied to the design of plasma enhanced chemical vapor deposition (PECVD), and the flow of PECVD optimization design and DFMEA calculation template are proposed. The results show that this method can effectively analyze the cause and effect of PECVD faults and optimize the system design.