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介绍了以激光干涉法形成正弦调制起伏图形，结合电镀图形转移工艺获得了图形模板，采用旋转涂覆等工艺将调制图形转移至掺溴聚苯乙烯薄膜的表面，获得了掺溴聚苯乙烯平面调制箔靶。研究了调制起伏图形的精确转移工艺，以SEM和台阶仪监控图形转移过程，控制耦合在调制图形上的表面粗糙度。
In this paper, a sinusoidal modulated undulation pattern is formed by laser interferometry, and a pattern template is obtained by combining with a pattern transfer process. The modulation pattern is transferred onto the surface of a brominated polystyrene film by using a spin coating method to obtain a brominated polystyrene surface Modulated foil target. The precise transfer process of modulation undulation pattern was studied. The SEM and stepper were used to monitor the pattern transfer process and control the surface roughness of the modulation pattern.