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当样品气体引入真空系统后，原壁面吸附的气体将被引入气体快速地置换而解吸出来，从而造成真空室内气体组分严重失真于样品气体，这对静态进样的质谱分析尤为严重。极限真空为 １× １０－５ Ｐａ的不锈钢真空系统充入Ｈｅ，Ｎｅ或Ａｒ后，ＣＯ的解吸速度比未充气时提高８倍，Ｈ２和ＣＨ４的解吸速度更快。这种置换吸附和解吸作用有可能用于研究真空装置内某些吸附气体的快速除气，采用预充气法提高充气器件内气体的纯度和采用热封离法提高真空器件内的真空度等措施均基于这个原理。
When the sample gas is introduced into the vacuum system, the gas adsorbed on the original wall surface will be quickly replaced by the introduced gas to be desorbed, resulting in serious distortion of the gas components in the sample chamber. This is particularly serious for the static sample injection. After the He, Ne or Ar was filled into the stainless steel vacuum system with the ultimate vacuum of 1 × 10-5 Pa, the desorption rate of CO was increased by 8 times compared with that without aeration, and the desorption rates of H2 and CH4 were faster. Such displacement adsorption and desorption may be used to study the rapid outgassing of some adsorbed gases in the vacuum device, the pre-charge method to improve the purity of the gas in the inflatable device, and the heat-sealing method to increase the vacuum in the vacuum device Based on this principle.