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本文提出了一种对扩散炉进行自动控制的系统设计。它通过在传统模拟PID调节系统前增加一个可编程控制器,实现了对扩散炉炉温变化速率、工件车及气体扩散的自动控制。实践证明该系统是稳定可靠的。
This paper presents a system design for automatic control of diffusion furnace. By adding a programmable controller to the traditional analog PID regulating system, it achieves automatic control of the rate of change of furnace temperature, workpiece car and gas diffusion. Practice has proved that the system is stable and reliable.