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由悬臂梁与探针集成件（Ｃａｎｔｉｌｅｖｅｒｓｔｙｌｕｓ）组成的力传感器是原子力显微镜的一个关键部件，固有频率（ｒｅｓｏｎａｎｔｆｒｅｑｕｅｎｃｙ）是悬臂梁与探针集成件的一个重要技术指标，本文介绍了对力传感器的要求、力传感器的设计、检测力传感器的方法，着重介绍了一种采用光学象散原理组成的传感器的固有频率测试系统与方法。
A force sensor consisting of a cantilever and a probe assembly is a key component of AFM. The resonant frequency is an important technical indicator of the cantilever and probe assembly. This paper presents the requirements for a force sensor , The design of the force sensor and the method of detecting the force sensor, a system and method of measuring the natural frequency of a sensor using the principle of optical astigmatism are emphatically introduced.