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介绍了自主设计高精度皮秒激光微加工系统及其控制单元。首先在加工系统整体方案的设计上充分考虑了激光器的选择、光束质量、控制方式等对加工精度的影响。将高斯光束转化为平顶光束引入激光微加工。其次使用了一种位置比较脉冲的光机同步技术,使得激光脉冲在空间上均匀分布,改善了加工效果。最后在系统中加入了路径规划、实时监测及同步显示等功能,实现系统加工线宽达到3.64μm,绝对定位精度小于1μm的激光微加工。
The self-designed high-precision picosecond laser micro-machining system and its control unit are introduced. First of all, the overall design of the processing system fully considers the influence of laser selection, beam quality and control method on the machining accuracy. Converting a Gaussian beam into a flattened beam introduces laser micromachining. Followed by the use of a position comparison pulse machine synchronization technology, making the laser pulse evenly distributed in space to improve the processing effect. Finally, the path planning, real-time monitoring and synchronous display are added to the system to realize the laser micromachining with the system processing line width of 3.64μm and the absolute positioning accuracy of less than 1μm.