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利用质量分离的低能离子束技术,获得了磁性Fe Si合金薄膜。利用俄歇电子能谱法(AES)、X射线衍射法(XRD)以及交变梯度样品磁强计(AGM)测试了样品的组分、结构以及磁特性。测试结果表明在室温下制备的Fe Si合金是Fe组分渐变的非晶薄膜,具有室温铁磁性。当衬底温度为300℃时制备的非晶Fe Si薄膜中有Fe硅化物FeSi相产生,样品的铁磁性被抑制。
The use of mass separation of low energy ion beam technology to obtain a magnetic Fe Si alloy film. The composition, structure and magnetic properties of the samples were tested by Auger electron spectroscopy (AES), X-ray diffraction (XRD) and alternating gradient sample magnetometer (AGM). The test results show that the Fe Si alloy prepared at room temperature is a graded amorphous Fe film with room temperature ferromagnetism. When the substrate temperature is 300 ℃, Fe silicide FeSi phase is produced in the amorphous Fe Si film, and the ferromagnetism of the sample is suppressed.