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对几种氧化物介质膜料的单层膜、增透膜及高反膜的激光损伤特性进行了实验研究,分别测试了单脉冲和多脉冲1064nm激光的损伤阈值,分析和讨论了实验的物理现象及其结果。研究表明SiO2、Gd2O3、Er2O3、Y2O3具有激光损伤阈值高、损伤程度轻的特点,特别对10Hz激光而言,更是明显;增透膜及高反膜加λ2层SiO2对其激光零损伤概率阈值影响不大,但在能量密度大于损伤阈值的情况下,可明显降低薄膜的激光损伤程度和损伤几率。
The laser damage properties of monolayer films, antireflection coatings and high antireflective films of several oxide films were investigated experimentally. The damage thresholds of single and multi-pulse 1064nm lasers were tested respectively. The experimental physics Phenomenon and its result. The results show that SiO2, Gd2O3, Er2O3 and Y2O3 have the characteristics of high laser damage threshold and low degree of damage, especially for 10Hz laser. The anti-laser zero damage probability threshold Little effect, but when the energy density is greater than the damage threshold, it can significantly reduce the degree of laser damage and damage probability of the film.