Optimization of a guided-mode resonance filter by varying the thickness of the buffer layer

• 作 者: 徐翔翌 吳柏璁 黃正昇
• 机 构: Department of Mechanical Engineering, National Chiao Tung University,
• 出 处: Chinese Optics Letters
• 发表日期: 2016年03期
• 关键词: guided molding waveguide figure FWHM slightly adjusting resonant spectrometer te

In this Letter, we demonstrate that by adjusting the thickness of the buffer layer, the optical responses of a guided-mode resonance filter(GMRF) can be improved for sensor applications. The GMRF is fabricated using a replica molding with a plastic substrate and a UV-curable polymer. SiO_2 buffer layers of different thicknesses are deposited before the waveguide-layer deposition. The sensitivity of the GMRFs decreases slightly with increasing SiO_2 layer thickness. By contrast, the full width at half-maximum reduces substantially with increasing SiO_2 layer thickness, resulting in the improvement of the overall figure of merit.

In this Letter, we demonstrate that by adjusting the thickness of the buffer layer, the optical responses of a guided-mode resonance filter (GMRF) can be improved for sensor applications. The GMRF is fabricated using a replica molding with a plastic substrate and a The sensitivity of the GMRFs decreases slightly with increasing SiO_2 layer thickness. By contrast, the full width at half-maximum varies substantially with increasing SiO_2 layer thickness , resulting in the improvement of the overall figure of merit.