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一、引言当前,在表声波器件的制作过程中,大家共同关心和遇到的一个问题,就是如何提高刻图精度。也就是说,从某种意义上来讲,刻图精度成了提高器件性能的关键工艺技术问题。国内生产的刻图机精度,其最小分辨精度为一丝,由于丝槓的加工误差和使用过程中的磨损,使得刻图机的刻图定位精度在5—6丝或7—8丝的范围,这样的精度来刻图将会给器件质量的提高带来很大的困难。为了提高器件质量,大家都在力求用高精度的刻图机进行刻图,用长刻机进行刻
I. INTRODUCTION Currently, one of the common concerns and encounters in the production of surface acoustical devices is how to improve the precision of engraving. In other words, in a sense, the accuracy of marking has become a key process technology to improve device performance. Domestic production of engraving machine accuracy, the minimum resolution accuracy of a trace, due to the machining error of the screw and the use of wear and tear, making engraving machine engraved positioning accuracy of 5-6 wire or 7-8 wire range, Such precision to figure will bring great improvement to the quality of the device. In order to improve the quality of the device, we are trying hard to use high-precision engraving machine engraving, engraved engraving machine