论文部分内容阅读
最近在许多方面都显著地向轻薄短小化发展,其典型例子是半导体的高集成化。集成度在呈几何级数增大,要求加工精度正由精密级向超精密级过渡。保证高精度开发精密加工机
In recent years, there have been notable developments in many aspects of miniaturization and thinning. A typical example of this is the highly integrated semiconductor. Integration in the geometrical series increased, requiring precision machining is precision to ultra-precision level transition. To ensure the development of precision machining precision machines