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对于微光刻领域来说,由于对准误羞和组合套刻特性正在变得愈加重要,自动对准技术以很高的成品率和相应的生产效率从根本上适应了这种局面。本文叙述了一种设计来用于(但不是局限用于)投影光刻机的自动对准系统。为了实现自动对准的目的,我们采用了一个光导摄象管来检测掩摸和片子上特殊标记的投影图像。电视信号由一台微处理机进行处理,从而通过图形识别的运算来确定对准标记的位置并进行必要的对准校正。本系统从概念上十分相似算符对准,但给出了更高的对准精度和更加适应的性能。最后讨论了计算原理和实际性能。
In the field of microlithography, alignment alignment, which is fundamentally adapted to high yields and corresponding productivity, is becoming more and more important as alignment and shyness and modularity are becoming more important. This article describes an automatic alignment system designed for, but not limited to, a projection lithography machine. For the purpose of auto-alignment, we used a photoconductive tube to detect the projected images of the masking and special marking on the film. The television signal is processed by a microprocessor so that the location of the alignment mark is determined by the operation of pattern recognition and the necessary alignment correction is made. The system is conceptually very similar to operator alignment, but gives higher alignment accuracy and more adaptive performance. Finally, the calculation principle and the actual performance are discussed.