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本文叙述单坐标双通道的不直度测量仪的模型.它对测量激光束的横向位移和由激光束的轴线“弯曲”引起的合成误差作了补偿.在10～15m长度内不直度的测量误盖为±2μm/m,其灵敏度和测量重复性可满足对高精度检查设备的要求.
This paper describes a single-coordinate, two-channel model of an inclinometer that compensates for the lateral displacement of the measuring laser beam and the resultant error caused by the “bending” of the laser beam axis. Measuring error cover is ± 2μm / m, its sensitivity and repeatability of measurement to meet the requirements of high-precision inspection equipment.