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激光对光学薄膜的损伤仍然是限制高能激光系统的主要挑战。对杂质诱导薄膜损伤的激励进行了研究:首先对损伤形貌进行了观测,在此基础上对杂质对薄膜的作用效应进行了分析。研究结果表明:杂质粒子对薄膜产生的各种效应,主要分为热力学效应、散射引起干涉效应和激光等离子体破坏效应,这三种效应的共同作用效果决定了损伤的特点。这些作用效应与粒子的半径密切相关:当粒子较小时,激光的沉积量较少,引起邻近材料的温升较低,扩散范围较小,主要是熔化破坏;当粒子较大时,激光沉积量较多,会引起邻近光学材料的汽化和电离,形成激光等离子体而造成大的烧蚀坑。
Laser damage to the optical film remains a major challenge limiting the high-energy laser system. The excitation of impurity-induced thin-film damage was studied. Firstly, the damage morphology was observed, and then the effect of impurities on the thin film was analyzed. The results show that the various effects of impurity particles on the film are mainly classified into thermodynamic effects, scattering-induced interference effects and laser plasma damage effects. The combined effects of these three effects determine the characteristics of the damage. These effects are closely related to the radius of the particles: when the particles are small, the deposition amount of the laser is small, causing the temperature rise of the adjacent material to be lower, the diffusion range is smaller, mainly the melting failure; when the particles are large, the laser deposition amount More, will cause the adjacent optical materials vaporization and ionization, the formation of laser plasma and cause a large ablation pit.