论文部分内容阅读
,Low power fluorine plasma effects on electrical reliability of AlGaN/GaN high electron mobility tra
【机 构】
:
State Key Discipline Laboratory of Wide Bandgap Semiconductor Technology, Xidian University, Xi’an 7
【出 处】
:
中国物理B(英文版)
【发表日期】
:
2017年1期
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