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一、引言球体和柱体几何形状的测量通常用电学和机械触头实现。下面介绍的干涉仪比其他方法有更高准确度。用干涉仪法,除受重力支持外,还可避免表面和其他元件之间的实际接触。干涉仪能测量标准具 E_1和 E_2面与被测试样的
I. INTRODUCTION Spherical and cylindrical geometry measurements are usually made using electrical and mechanical contacts. The interferometer described below has more accuracy than other methods. With the interferometer method, in addition to being supported by gravity, the actual contact between the surface and other components can also be avoided. Interferometer can measure etalon E_1 and E_2 surface with the sample under test