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光电位置传感器PSD(PositionSensitiveDetector)具有响应时间短、位置分辨率高、光谱响应范围大等优点,但位置检测精度不尽人意,只要对其进行标定修正,仍能达到相当高的精度。本文介绍PSD的标定方法及其在光扫描实时动态测试中的应用。
The Position Sensitive Detector (PSD) has the advantages of short response time, high position resolution and large spectral response range. However, the accuracy of position detection is unsatisfactory, so long as the calibration is correct, it still achieves a fairly high accuracy. This paper introduces the PSD calibration method and its application in real-time optical scanning.