论文部分内容阅读
芯片制造厂在清洗、蚀刻和沉积工序中大量使用化学药剂和特殊材料气体。为了芯片制造厂的职业健康风险防控,利用计算流体模拟软件Fluent研究芯片制造厂的金属蚀刻反应腔在保养期间HCl的逸出扩散规律。通过模拟给出洁净室内的速度场分布以及HCl浓度场分布规律,按照工作场所有害因素职业接触限值确定划分防控的3级区域——职业接触管制区域、职业限制区域、安全区域,从而为职业防控措施提出建议。
Chip manufacturers make extensive use of chemicals and specialty materials in cleaning, etching, and deposition processes. In order to prevent and control the occupational health risk of the chip manufacturer, computational fluid simulation software Fluent was used to study the law of escape and diffusion of HCl during the metal etching of the chip manufacturing plant during maintenance. Through the simulation, the distribution of velocity field in the clean room and the distribution of HCl concentration field are given, and the level 3 areas of occupational exposure control, occupational restricted areas and safety areas are determined according to occupational exposure limits of harmful factors in the workplace. Occupational prevention and control measures to make recommendations.