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设计和制作了由 5个 2× 2多模干涉马赫 -曾德开关元组成的重排无阻塞型 SOI 4× 4热光开关阵列 .阵列的最小和最大附加损耗分别为 6 .6和 10 .4 d B,阵列的串扰为 - 12～ - 19.8d B,光开关阵列的开关速度小于 30μs,单个开关元的功耗大约为 330 m W.
The rearranged non-blocking SOI 4 × 4 thermal optical switch array composed of five 2 × 2 multimode interference Mach-Zehnder switch cells was designed and fabricated.The minimum and maximum additional losses of the array were respectively 6.6 and 10. 4 d B, the crosstalk of the array is -12 ~ -19.8 dB, the switching speed of the optical switch array is less than 30 μs, and the power consumption of a single switch cell is about 330 mW.