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补偿对准测量方法 (CALM )是视觉测量水平向、垂直向、旋转偏差及倍率误差等步进机对准可校正因素的一种新技术。CALM技术是根据已曝光在抗蚀剂中的线条间隙图形在显影之前 ,通过准确偏移光栅 1/2间距再次曝光 ,然后完全除去已曝光部分的原理建立的。采用这一原理已制作了直观显示可校正因素的试验片。CALM读数与盒中盒 (BB)测量比较的测算 3σ值精度为 0 0 3 μm。CALM读数与BB测量之间的线性度保持在± 0 13 μm误对准范围。采用此技术允许更频繁地进行基线校正。
Compensation Alignment Measurement Method (CALM) is a new technology that visually measures the correctible factors of stepper alignment such as horizontal, vertical, rotational deviation and magnification error. The CALM technique was based on the principle that line-gap patterns in the resist exposed in the resist were developed before they were developed by exactly offsetting the grating 1/2 pitch and then completely removing the exposed portions. Using this principle, a test piece that visually shows the correctable factors has been made. The calculated 3σ value for the CALM readings compared to the box-in-box (BB) measurements was 0 0 3 μm. The linearity between the CALM reading and the BB measurement remains within ± 0 13 μm misalignment range. Using this technique allows more frequent baseline correction.