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The humidity sensing properties of La3+ and K+ co-doped Ti0.9Sn0.1O2 thin films were investigated. The humidity sensitive thin films were prepared by sol-gel method on alumina substrates. The sensing behaviors of thin films were inspected at different sintering temperatures by constructing a humidity-impedance measuring system. It was found that the addition of rare earth ion La3+ and alkali ion K+ was beneficial for improving the humidity sensitive properties of the samples and La0.003K0.5Ti0.9Sn0.1O2 sintered at 500 ℃ for 4 h showed the best humidity sensing properties. The impedance of this thin film decreased from 109 to 104 Ω with excellent linearity in the humidity range of 11%-95%. Narrow hysteresis loop, prominent stability and high sensitivity were obtained. The effects of dopant con-tent and doping mechanism on humidity sensitivity were also discussed in terms of segregation of rare earth ions at grain boundaries and granularity of crystalline and influence of K+ on the decrease in the intrinsic resistance of the materials, and increase in the number of wa-ter adsorption sites.
The humidity behaviors of La3 + and K + co-doped Ti0.9Sn0.1O2 thin films were investigated. The sensing behaviors of thin films were inspected at different сondition temperatures by constructing a humidity-impedance measuring system. It was found that the addition of rare earth ion La3 + and alkali ion K + was beneficial for improving humidity sensitive properties of the samples and La0.003K0.5Ti0.9Sn0.1O2 sintered at 500 ° C for 4 The impedance of this thin film decreased from 109 to 104 Ω with excellent linearity in the humidity range of 11% -95%. Narrow hysteresis loop, prominent stability and high sensitivity were obtained. The effects of dopant con-tent and doping mechanism on humidity sensitivity were also discussed in terms of segregation of rare earth ions at grain boundaries and granularity of crystalline and influence of K + on the de crease in the intrinsic resistance of the materials, and increase in the number of wa-ter adsorption sites.