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在700～1000℃下,用无水AlCl_3和NH_3的化学气相淀积反应合成得到了AlN超细粉末,并研究了反应温度、总流量、AlCl_3浓度等对AlN粉末理化性质的影响。结果表明:(1)粉末的形态受反应温度和[NH_3]/[AlCl_3]的影响;⌒2)粉末的粒度与分布宽度随反应温度的增加、总流量的增加以及AlCl_3浓度的减小而减小;(3)产物AlN粉末中晶态AlN的含量随反应温度的升高而增加;(4)产物A1N中副产物NH_4Cl可经600℃热处理除去;(5)非晶态AlN在1450℃下可转变为晶态AlN,其粒径小于250nm,几何标准方差GSD小于1.3,氮含量大于33.5％,氧含量小于1％,氯含量小于0.1％,阳离子杂质含量小于1.5×10~(-2)％。
The AlN ultrafine powders were synthesized by chemical vapor deposition of anhydrous AlCl 3 and NH 3 at 700-1000 ℃. The effects of reaction temperature, total flow rate and AlCl 3 concentration on the physico-chemical properties of AlN powders were studied. The results show that: (1) the morphology of the powder is affected by the reaction temperature and [NH 3] / [AlCl 3]; ⌒2) the particle size and distribution width of the powder decrease with the increase of the reaction temperature, the increase of the total flow and the decrease of the AlCl 3 concentration ; (3) the content of crystalline AlN in the product AlN powder increases with the reaction temperature; (4) the byproduct NH4Cl in the product A1N can be removed by heat treatment at 600 DEG C; Can be transformed into crystalline AlN with a particle size of less than 250 nm, a geometric standard deviation of GSD less than 1.3, a nitrogen content of more than 33.5%, an oxygen content of less than 1%, a chlorine content of less than 0.1% and a cationic impurity content of less than 1.5 × 10 -2 %.