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TiO2在光催化方面具有较好的应用前景,可望用于有害污染物的降解处理;但由于其禁带宽度对应的激发波长在紫外区,限制了其大规模应用。文章利用操作简便、易于控制的真空阴极电弧离子镀膜技术,制备了非掺氮和掺氮的TiO2薄膜。并分别在300℃和500℃退火后,获得了非晶态向锐钛矿结晶的转变。结果还表明,掺氮TiO2薄膜的相变温度比非掺氮的TiO2薄膜要高,其光吸收区也从紫外区扩展到了可见光区。
TiO2 has good application prospect in photocatalysis and is expected to be used in the degradation of harmful pollutants. However, the excitation wavelength corresponding to the forbidden band width in the ultraviolet region limits its large-scale application. In this paper, non-doped and nitrogen-doped TiO2 thin films were prepared by vacuum cathodic arc ion plating technique with easy operation and easy control. After annealing at 300 ℃ and 500 ℃ respectively, the transformation from amorphous to anatase crystal was obtained. The results also show that the phase transition temperature of the doped TiO2 film is higher than that of the non-doped TiO2 film, and its light absorption area also extends from the ultraviolet region to the visible region.