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本文简述了场发射真空微二极管的工作特点、结构参数设计考虑及制备工艺技术，对键合法制备的样品进行了测试分析：起始发射电压５～６伏，反向击穿电压大于７０伏发射在田极电压为２０Ｖ时达０．５ｍＡ。
In this paper, the working characteristics, structural parameter design and fabrication technology of the field emission vacuum micro-diode are briefly described. The samples prepared by the bonding method are analyzed and tested. The starting emission voltage is 5-6V and the reverse breakdown voltage is greater than 70V Launched in the field when the voltage is 20V up to 0.5mA.