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采用双靶反应溅射制得 Sn O2 ∶ Zr薄膜 ,并对它作了 1 5 0°C下 SO2 气敏光学特性试验 ,首次发现在适当工艺条件下制得的 Sn O2 ∶Zr薄膜在近红外波段 (1 .7～ 3 μm)对 SO2 气体具有明显的光学气敏特性 ,在 2 .65 μm附近透过率上升幅度达 1 0 %左右 .Zr的引入增强了 Sn O2 薄膜对 SO2 的吸附能力 .用二次离子质谱对吸附 SO2 前后的薄膜作了组分相对含量分析 .本实验结果对今后研究高性能 SO2 气敏传感器有一定的价值 .
SnO2: Zr thin films were prepared by double-target reactive sputtering and the SO2 gas-sensing optical properties were tested at 150 ° C. The SnO2: Zr thin films fabricated under appropriate conditions were found for the first time in the near infrared The band (1.7 ~ 3 μm) has obvious optical gas sensitivities to SO2 gas, and the transmittance increases by about 10% near 2.65 μm.The introduction of Zr enhances the adsorption capacity of SnO2 on SO2 The relative content of the components before and after the adsorption of SO2 was analyzed by SIMS.The experimental results have certain value for the future research of high performance SO2 gas sensor.